Wafer edge trim blade with slots
US9676114B2 · kind B2 · utility
4Cited by
17References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 29, 2012 |
| Grant date | Jun 13, 2017 |
| Priority date | — |
| Expiry date | Apr 23, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T83/9372
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A wafer edge trim blade includes a round blade body and at least one slot formed inward from an outside edge of the round blade body. The at least one slot is configured to remove debris generated during wafer edge trimming using the wafer edge trim blade.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.