Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head

US9677871B2 · kind B2 · utility

Assignee

• PRECITEC OPTRONIK GMBH · DE

Inventors

• Martin Schönleber · Aschaffenburg, DE
• Berthold Michelt · Wiesbaden, DE
• Matthias Kunkel · Gelnhausen, DE

Key dates

• Filing date: May 15, 2015
• Grant date: Jun 13, 2017
• Expiry date: Jul 7, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B2210/50
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to an optical measuring process for acquiring a surface topography of a measurement object. To this end, a measuring device with a measuring head in a measuring head guide device is provided for chromatic confocal acquisition of the surface topography or for spectral interferometric OCT acquisition of the distance to the surface topography. Firstly, spectrally broadband light of a light source from a fiber array with i fibers of i measurement spots is directed onto the measurement object via a common measuring head optic, with formation of a spot array of i measurement spots. i reflection spectra of the i measurement channels are then acquired and digitized. Finally, the digitized reflection spectra are evaluated with removal of time variations of systematic measurement errors and time-related deviation movements of the measuring head guide device.