Method of correcting measurement error of shape measuring apparatus, and shape measuring apparatus
US9683839B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2015 |
| Grant date | Jun 20, 2017 |
| Priority date | — |
| Expiry date | Nov 10, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B5/008
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a shape measuring apparatus having a scanning probe to perform scanning measurement using a tip ball provided at an end of a stylus with the tip ball being in contact with an object to be measured, a tip ball displacement detector detects a displacement of the tip ball of the scanning probe, a displacement of a moving mechanism that relatively moves the object to be measured and the scanning probe is detected, and an angle formed by a contact direction of the tip ball with the object to be measured and an axial direction of the stylus is calculated. The displacement of the tip ball that is detected by the tip ball displacement detector is corrected on the basis of the angle, and a corrected value of the displacement is outputted. The corrected value is added to the displacement of the moving mechanism to calculate a measurement value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.