Linear vacuum robot with z motion and articulated arm
US9691649B2 · kind B2 · utility
4Cited by
26References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 31, 2011 |
| Grant date | Jun 27, 2017 |
| Priority date | — |
| Expiry date | Jan 7, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20323
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers. A four-axis robot arm is disclosed, capable of linear translation, rotation and articulation, and z-motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.