Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods
US9698041B2 · kind B2 · utility
2Cited by
12References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2014 |
| Grant date | Jul 4, 2017 |
| Priority date | — |
| Expiry date | Feb 21, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67248
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Substrate temperature control apparatus including optical fiber temperature control are described. Substrate temperature control apparatus includes a base, a thermal contact member proximate to the base, and a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and thermal contact member. Substrate temperature control systems and electronic device processing systems and methods including optical fiber temperature control are described, as are numerous other aspects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.