Patent · US Active

Multi-spot collection optics

US9702983B2 · kind B2 · utility

22Cited by

6References

20Claims

0Family size

Assignees

Applied Materials Israel Ltd. · IL
Carl Zeiss Microscopy GmbH · DE

Inventors

Haim Eder · Kiryat Ono, IL
Nissim Elmaliach · Raanana, IL
Igor Krayvitz (Krivts) · Rehovot, IL
Mario Mützel · Aalen, DE

Key dates

Filing date	May 2, 2012
Grant date	Jul 11, 2017
Priority date	—
Expiry date	Feb 15, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2446
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.