Circuit probe for charged particle beam system
US9709600B2 · kind B2 · utility
2Cited by
76References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 14, 2014 |
| Grant date | Jul 18, 2017 |
| Priority date | — |
| Expiry date | Mar 7, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24592
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A probe assembly can be connected and disconnected from its electrical harness within a vacuum chamber so that the probe assembly with the work piece mounted can be rotated and tilted without interference from a cable, and can then be reconnected without opening the vacuum chamber. Also described is a means of grounding a sample and probes when the probe assembly is disconnected from its electrical harness and a means of preventing damage to the probe mechanism and the probe itself by ensuring that the probes are not sticking up too far during operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.