Inline dispense capacitor

US9718082B2 · kind B2 · utility

Assignee

• TOKYO ELECTRON LIMITED · JP

Inventors

• Anton J. deVilliers · Boise, US
• Ronald Nasman · Averill Park, US
• James Grootegoed · Wynantskill, US
• Norman A. Jacobson, Jr. · Scotia, US

Key dates

• Filing date: Jan 20, 2015
• Grant date: Aug 1, 2017
• Expiry date: Jan 20, 2035

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T137/7787
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A fluid dispensing apparatus is disclosed. Systems include an in-line or linear bladder apparatus configured to expand to collect a charge of fluid, and contract to assist with fluid delivery and dispensing. During a dispense-off period process fluid can collect in this bladder after the process fluid is pushed through a fine filter (micro filter). A given filtration rate can be less than a dispense rate and thus the system herein compensates for filter-lag that often accompanies fluid filtering for microfabrication, while providing a generally linear configuration that reduces chances for defect creation.