Resin composition and pattern forming method using the same
US9718901B2 · kind B2 · utility
3Cited by
11References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 30, 2014 |
| Grant date | Aug 1, 2017 |
| Priority date | — |
| Expiry date | Dec 30, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0388
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A resin composition of the present invention includes a polymer compound (A) containing a repeating unit (Q) represented by the following general formula (1):
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.