Inventor · Shizuoka, JP

Kaoru Iwato

51Patents
6h-index
43Co-inventors
68Inventor score

Filing activity: Nov 30, 2001 → Aug 12, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US7625690B2 Positive resist composition and pattern forming method using the same Emerging Cross-Sectional Technologies 16 Active
US9897922B2 Method of forming pattern and developer for use in the method Physics 10 Active
US8252877B2 Polymerizable compound and polymer compound obtained by using the same Chemistry; Metallurgy 10 Active
US8822129B2 Pattern forming method, electron beam-sensitive or extreme ultraviolet-sensitive composition, resist film, manufacturing method of electronic device, and electronic device Emerging Cross-Sectional Technologies 10 Active
US7449573B2 Photosensitive composition, compound for use in the photosensitive composition, and method of pattern formation with the photosensitive composition Emerging Cross-Sectional Technologies 10 Expired
US9448482B2 Pattern forming method, resist pattern formed by the method, method for manufacturing electronic device using the same, and electronic device Electricity 7 Active
US9417528B2 Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device Electricity 5 Active
US9291892B2 Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the composition Physics 5 Active
US6841330B2 Planographic printing plate precursor Performing Operations; Transporting 4 Expired
US7887988B2 Positive resist composition and pattern forming method using the same Emerging Cross-Sectional Technologies 4 Active
US8999622B2 Pattern forming method, chemical amplification resist composition and resist film Emerging Cross-Sectional Technologies 3 Active
US9250532B2 Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device Physics 3 Active
US8999621B2 Pattern forming method, chemical amplification resist composition and resist film Emerging Cross-Sectional Technologies 3 Active
US9718901B2 Resin composition and pattern forming method using the same Physics 3 Active
US8795944B2 Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the composition Physics 2 Active
US8617788B2 Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same Physics 2 Active
US8158326B2 Photosensitive composition, compound for use in the photosensitive composition, and method of pattern formation with the photosensitive composition Emerging Cross-Sectional Technologies 2 Active
US8802349B2 Actinic ray-sensitive or radiation-sensitive resin composition and resist film and pattern forming method using the composition Emerging Cross-Sectional Technologies 2 Active
US9709892B2 Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the same Emerging Cross-Sectional Technologies 1 Active
US9097973B2 Method of forming pattern and developer for use in the method Physics 1 Active
US10248019B2 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film Physics 1 Active
US9075310B2 Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device Electricity 1 Active
US7160667B2 Image forming material Emerging Cross-Sectional Technologies 1 Expired
US9760003B2 Pattern forming method and actinic-ray- or radiation-sensitive resin composition Emerging Cross-Sectional Technologies 1 Active
US9551935B2 Pattern forming method and resist composition Emerging Cross-Sectional Technologies 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.