Electrostatic chuck with LED heating

US9728430B2 · kind B2 · utility

Assignee

• Varian Semiconductor Equipment Associates, Inc. · US

Inventors

• Jason M. Schaller · Austin, US
• William T. Weaver · Austin, US
• Morgan Evans · Attleboro, US
• Robert Brent Vopat · Austin, US
• Paul E. Pergande · Beverly Hills, US
• Julian G. Blake · Beverly Farms, US
• David Blahnik · Round Rock, US
• Ala Moradian · Sunnyvale, US

Key dates

• Filing date: Jun 29, 2015
• Grant date: Aug 8, 2017
• Expiry date: Dec 17, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/6831
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An electrostatic chuck with LED heating is disclosed. The electrostatic chuck with LED heating comprises a first subassembly, which comprises a LED heater, and a second subassembly, which comprises an electrostatic chuck. The LED substrate heater subassembly includes a base having a recessed portion. A plurality of light emitting diodes (LEDs) is disposed within the recessed portion. The LEDs may be GaN or GaP LEDs, which emit light at a wavelength which is readily absorbed by silicon, thus efficiently and quickly heating the substrate. The second subassembly, which comprises an electrostatic chuck, is disposed on the LED substrate heater subassembly. The electrostatic chuck includes a top dielectric layer and an interior layer that are transparent at the wavelength emitted by the LEDs. One or more electrodes are disposed between the top dielectric layer and the interior layer to create the electrostatic force.