Inventor · Attleboro, MA, US

Morgan Evans

88Patents
7h-index
86Co-inventors
75Inventor score

Filing activity: Jan 16, 2002 → Jun 26, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8815720B2 Method of etching a workpiece Electricity 99 Active
US7176470B1 Technique for high-efficiency ion implantation Electricity 22 Expired
US6690022B2 Ion beam incidence angle and beam divergence monitor Electricity 16 Expired
US10302826B1 Controlling etch angles by substrate rotation in angled etch tools Electricity 11 Active
US7755066B2 Techniques for improved uniformity tuning in an ion implanter system Electricity 10 Active
US9287148B1 Dynamic heating method and system for wafer processing Electricity 10 Active
USD825912S1 Crutches General 8 Active
US7355188B2 Technique for uniformity tuning in an ion implanter system Electricity 7 Active
US10775158B2 System and method for detecting etch depth of angled surface relief gratings Physics 6 Active
US10823888B1 Methods of producing slanted gratings with variable etch depths Physics 6 Active
US10935799B2 Optical component having depth modulated angled gratings and method of formation Physics 5 Active
US7663125B2 Ion beam current uniformity monitor, ion implanter and related method Electricity 5 Active
US10690821B1 Methods of producing slanted gratings Electricity 5 Active
US11247298B2 Method of forming a plurality of gratings Physics 4 Active
US7342240B2 Ion beam current monitoring Electricity 4 Active
US11119405B2 Techniques for forming angled structures Electricity 3 Active
US11226441B2 Methods of producing slanted gratings with variable etch depths Physics 2 Active
US10598832B2 System and method for forming diffracted optical element having varied gratings Physics 2 Active
US9633886B2 Hybrid thermal electrostatic clamp Electricity 2 Active
US7521691B2 Magnetic monitoring of a Faraday cup for an ion implanter Electricity 2 Active
US10607847B1 Gate all around device and method of formation using angled ions Electricity 2 Active
US9933314B2 Semiconductor workpiece temperature measurement system Electricity 2 Active
US10795173B2 System and method for optimally forming gratings of diffracted optical elements Physics 2 Active
US11715621B2 Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions Electricity 2 Active
US8906727B2 Heteroepitaxial growth using ion implantation Chemistry; Metallurgy 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.