Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
US9748120B2 · kind B2 · utility
2Cited by
52References
11Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 1, 2013 |
| Grant date | Aug 29, 2017 |
| Priority date | — |
| Expiry date | Jun 29, 2036 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF27D2099/0008
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. The infrared heating elements are arranged in a nested configuration so as to define individually controllable inner, middle and outer heating zones adjacent a disc-shaped article when positioned on the spin chuck.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.