Radiation source and lithographic apparatus
US9753383B2 · kind B2 · utility
1Cited by
3References
14Claims
0Family size
Assignee
Inventors
- Michel Riepen
- Dzmitry Labetski
- Wilbert Jan Mestrom
- Wim Ronald Kampinga
- Jan Okke Nieuwenkamp
- Jacob Brinkert
- Henricus Jozef Castelijns
- Nicolaas Ten Kate
- Hendrikus Gijsbertus Schimmel
- Hans Jansen
- Dennis Jozef Maria Paulussen
- Brian Vernon Virgo
- Reinier Theodorus Martinus Jilisen
- Ramin Badie
- Albert Pieter Rijpma
- Johannes Christiaan Leonardus Franken
- Peter van Putten
- Gerrit Van Der Straaten
Key dates
| Filing date | Jun 13, 2013 |
| Grant date | Sep 5, 2017 |
| Priority date | — |
| Expiry date | Jun 13, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/206
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A radiation source comprising a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation. The radiation source further comprises an immobile fuel debris receiving surface provided with a plurality of grooves. The grooves have orientations which are arranged to direct the flow of liquid fuel under the influence of gravity in one or more desired directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.