Heat treatment apparatus
US9759489B2 · kind B2 · utility
446Cited by
1References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 10, 2013 |
| Grant date | Sep 12, 2017 |
| Priority date | — |
| Expiry date | Jan 5, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6719
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A heat treatment apparatus includes: a reaction tube processing a plurality of substrates; a support member supporting the reaction tube; a flange protruding outwardly from a lower end of the reaction tube: a concave portion formed in an outer periphery of the flange; and a rotatable roller installed in a top surface of the support member. The rotatable roller engages the concave portion and positions the reaction tube in a circumferential direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.