Remote plasma generator using ceramic
US9773645B2 · kind B2 · utility
2Cited by
6References
16Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jan 29, 2016 |
| Grant date | Sep 26, 2017 |
| Priority date | — |
| Expiry date | Jan 29, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2242/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A remote plasma generator includes a body, a driver, and a protection tube. The body includes a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flow. The driver is coupled to the body and generates a magnetic field and plasma in the body. The protection tube is at an inner side of the plasma generation pipe to protect the plasma generation pipe from plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.