Soon-Im Wi
8Patents
5h-index
17Co-inventors
56Inventor score
Filing activity: Apr 28, 2004 → Sep 23, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7952048B2 | Plasma source with discharge inducing bridge and plasma processing system using the same | Electricity | 19 | Active |
| US8018163B2 | Capacitively coupled plasma reactor | Electricity | 12 | Active |
| US9054146B2 | Substrate transfer equipment and high speed substrate processing system using the same | Emerging Cross-Sectional Technologies | 8 | Active |
| US7285916B2 | Multi chamber plasma process system | Electricity | 5 | Expired |
| US8409400B2 | Inductive plasma chamber having multi discharge tube bridge | Electricity | 5 | Expired |
| US9773645B2 | Remote plasma generator using ceramic | Electricity | 2 | Active |
| US12183545B2 | Plasma reactor | Electricity | 1 | Active |
| US7477022B2 | System and method for driving a multi-lamp | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.