Shielded probe systems with controlled testing environments

US9784763B1 · kind B1 · utility

Assignee

• Cascade Microtech, Inc. · US

Inventors

• Michael Teich · Mannheim, DE
• Karsten Stoll · Wilthen, DE
• Walter Matthias Clauss · Radeberg, DE
• Swen Schmiedchen · Dresden, DE

Key dates

• Filing date: Apr 8, 2016
• Grant date: Oct 10, 2017
• Expiry date: May 17, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N31/02
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting stack extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting stack includes an electrically conductive support surface and a temperature-controlled chuck. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting stack.