Apodization for pupil imaging scatterometry

US9784987B2 · kind B2 · utility

Assignee

• KLA-TENCOR CORPORATION · US

Inventors

• Andrew V. Hill · Chino Hills, US
• Amnon Manassen · Haifa, IL
• Barak Bringoltz · Rehovot, IL
• Ohad Bachar · Timrat, IL
• Mark Ghinovker · Migdal HaEmek, IL
• Zeev Bomzon · Kiryat Tivon, IL
• Daniel Kandel · Aseret, IL

Key dates

• Filing date: Jul 14, 2015
• Grant date: Oct 10, 2017
• Expiry date: Jul 14, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2201/068
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The disclosure is directed to various apodization schemes for pupil imaging scatterometry. In some embodiments, the system includes an apodizer disposed within a pupil plane of the illumination path. In some embodiments, the system further includes an illumination scanner configured to scan a surface of the sample with at least a portion of apodized illumination. In some embodiments, the system includes an apodized pupil configured to provide a quadrupole illumination function. In some embodiments, the system further includes an apodized collection field stop. The various embodiments described herein may be combined to achieve certain advantages.