Fabrication of a malleable lamella for correlative atomic-resolution tomographic analyses
US9797923B2 · kind B2 · utility
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17Claims
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Key dates
| Filing date | Feb 20, 2015 |
| Grant date | Oct 24, 2017 |
| Priority date | — |
| Expiry date | Feb 20, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2958
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of forming a sample and performing correlative S/TEM and APM analysis is provided wherein a sample containing a region of interest is cut from a bulk of sample material and formed into an ultra-thin lamella. The lamella is then analyzed with an S/TEM to form an image. The lamella sample and mount may then go through a cleaning process to remove any contamination. The lamella containing the ROI is then embedded within a selected material and is formed into a needle-shaped sample. The needle-shaped sample is then analyzed with the APM and the resulting data is merged and correlated with the S/TEM data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.