System and method for defect detection using multi-spot scanning
US9810643B1 · kind B1 · utility
5Cited by
2References
13Claims
0Family size
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Key dates
| Filing date | Sep 25, 2013 |
| Grant date | Nov 7, 2017 |
| Priority date | — |
| Expiry date | Aug 18, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.