Compensation for Goos-Hanchen error in autofocus systems
US9816805B2 · kind B2 · utility
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22Claims
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Key dates
| Filing date | Jun 11, 2014 |
| Grant date | Nov 14, 2017 |
| Priority date | — |
| Expiry date | Jan 17, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/36
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Method of predicting a distribution of light in an illumination pupil of an illumination system includes identifying component(s) of the illumination system the adjustment of which affects this distribution and simulating the distribution based on a point spread function defined in part by the identified components. The point spread function has functional relationship with configurable setting of the illumination settings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.