Inventor · Tucson, AZ, US

Daniel Gene Smith

51Patents
4h-index
30Co-inventors
62Inventor score

Filing activity: Oct 5, 2006 → May 4, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9638799B2 Scan mirrors for laser radar Emerging Cross-Sectional Technologies 72 Active
US9618619B2 Radar systems with dual fiber coupled lasers Physics 7 Active
US8724095B2 Optical assembly for laser radar Physics 6 Active
US7982884B2 Autofocus system with error compensation Physics 4 Active
US10139492B2 Radar systems with dual fiber coupled lasers Physics 3 Active
US8829420B2 Two dimensional encoder system and method Physics 3 Active
US9625368B2 Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure Physics 3 Active
US9587977B2 Boresight error monitor for laser radar integrated optical assembly Physics 2 Active
US11982521B2 Measurement of a change in a geometrical characteristic and/or position of a workpiece Physics 2 Active
US8582119B2 Large scale metrology apparatus and method Physics 2 Active
US11061338B2 High-resolution position encoder with image sensor and encoded target pattern Electricity 1 Active
US10197668B2 Eighth wave corner cube retarder for laser radar Physics 1 Active
US10295911B2 Extreme ultraviolet lithography system that utilizes pattern stitching Physics 1 Active
US10837763B2 Optical assembly, method for producing data in the same, and method for manufacturing structure Physics 1 Active
US9243901B2 Rules for reducing the sensitivity of fringe projection autofocus to air temperature changes Physics 1 Active
US10747117B2 Extreme ultraviolet lithography system that utilizes pattern stitching Physics 1 Active
US10890849B2 EUV lithography system for dense line patterning Physics 1 Active
US8736813B2 Exposure apparatus with an illumination system generating multiple illumination beams Physics 1 Active
US9360347B2 Two-dimensional encoder system and method Physics 1 Active
US11934105B2 Optical objective for operation in EUV spectral region Physics 1 Active
US9074911B2 Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects Physics 1 Active
US8842296B2 Methods and devices for reducing errors in Goos-Hänchen corrections of displacement data Physics 1 Active
US7612892B2 Imaging optical system configured with through the lens optics for producing control information Physics 1 Active
US11099483B2 Euv lithography system for dense line patterning Physics 1 Active
US11300884B2 Illumination system with curved 1d-patterned mask for use in EUV-exposure tool Physics 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.