Patent · US Active

Method and structure for flip-chip package reliability monitoring using capacitive sensors groups

US9818655B2 · kind B2 · utility

2Cited by
11References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 8, 2015
Grant dateNov 14, 2017
Priority date
Expiry dateDec 8, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/73253
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Flip-chip package reliability monitoring and systems of monitoring using capacitive sensors are disclosed. The monitoring is conducted in situ and in real-time without the need for destructive testing of the packages. The capacitive sensors can be used for flip-chip package reliability monitoring.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.