Method and structure for flip-chip package reliability monitoring using capacitive sensors groups
US9818655B2 · kind B2 · utility
2Cited by
11References
11Claims
0Family size
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Key dates
| Filing date | Dec 8, 2015 |
| Grant date | Nov 14, 2017 |
| Priority date | — |
| Expiry date | Dec 8, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/73253
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Flip-chip package reliability monitoring and systems of monitoring using capacitive sensors are disclosed. The monitoring is conducted in situ and in real-time without the need for destructive testing of the packages. The capacitive sensors can be used for flip-chip package reliability monitoring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.