EMI/RF shielding of thermocouples
US9823133B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2010 |
| Grant date | Nov 21, 2017 |
| Priority date | — |
| Expiry date | Apr 20, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K1/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments disclosed herein generally relate to a temperature sensor disposed in an apparatus. In many semiconductor, liquid crystal display, solar panel or organic light emitting display fabrication processes, RF power is utilized to either ignite a plasma within the processing chamber or to provide supplemental energy to the process. Temperature control during many processes may be beneficial in order to produce a consistent product. Temperature sensors or thermocouples are sometimes utilized to measure the temperature of a substrate within a processing chamber. The RF power may have a negative impact on the temperature sensor. By coating the temperature sensor with a nanoparticle based metal coating, such as a silver coating, the negative impacts of the RF power on the temperature sensor may be reduced without contaminating the process, and an accurate temperature measurement may be obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.