Support frame for pellicles
US9841670B2 · kind B2 · utility
5Cited by
2References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 11, 2015 |
| Grant date | Dec 12, 2017 |
| Priority date | — |
| Expiry date | May 11, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70691
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided is a support frame for pellicles which includes an aluminum alloy-made frame body with a pellicle film bonded to a front surface of the frame body, and with a glass substrate bonded to a back surface of the frame body. A front-side recessed groove extending in a circumferential direction of the frame body is formed on the front surface of the frame body, and a front-side suction hole extending from an outer peripheral surface of the frame body to an inner surface of the front-side recessed groove is formed on the frame body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.