Inspection system and a method for evaluating an exit pupil of an inspection system
US9846128B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2016 |
| Grant date | Dec 19, 2017 |
| Priority date | — |
| Expiry date | Jan 19, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/956
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection system that may include a first detection module, an illumination and collection module, and a processor. The illumination and collection module and the first detection module may be configured to execute one or more illumination and collection iterations. Each inspection iteration may include: illuminating with illuminating radiation multiple points of an object; (ii) directing first collected radiation from the multiple points of the object through one or more first exit pupil regions towards the first detection module; and (iii) generating first detection signals that may be indicative of the first collected radiation. The processor may be configured to process the first detection signals to provide a first mapping between (i) a characteristic of radiation at the first exit pupil, (ii) the multiple points of the object, and (iii) the multiple first exit pupil regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.