Optical microscope device and testing apparatus comprising same
US9851548B2 · kind B2 · utility
2Cited by
0References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2012 |
| Grant date | Dec 26, 2017 |
| Priority date | — |
| Expiry date | Jul 16, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/365
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention allows observation or capturing of a high-contrast image of a sample for which sufficient contrast cannot be obtained in bright-field observation, such as a wafer having a pattern with a small pattern height. According to the present invention, a sample is illuminated through an objective lens used for capturing an image, and an imaging optics are provided with an aperture filter so that an image is captured while light of bright-field observation components is significantly attenuated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.