Patent · US Active

Optical component

US9851555B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Markus Holz · Aalen, DE
Benjamin Sigel · Aalen, DE
Jan Horn · Munich, DE
Benedikt Knauf · Aalen, DE
Fabian Haacker · Aalen, DE

Key dates

Filing date	Feb 23, 2016
Grant date	Dec 26, 2017
Priority date	—
Expiry date	Feb 28, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2224/48091
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical component includes at least one micro-opto-electro-mechanical system (MOEMS) with a front side and a rear side. The optical component also includes at least one printed circuit board arranged on the rear side of the at least one MOEMS. The at least one printed circuit board has lateral contacts. The at least one printed circuit board may be equipped with electronic parts and cooling elements. The at least one MOEMS projects laterally beyond the at least one printed circuit board.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.