Device and method for aligning substrates
US9851645B2 · kind B2 · utility
6Cited by
18References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 6, 2013 |
| Grant date | Dec 26, 2017 |
| Priority date | — |
| Expiry date | May 21, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/26
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for aligning and bringing a first substrate into contact with a second substrate as well as a corresponding device with at least four detection units wherein:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.