High-resolution scanning microscopy

US9864182B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Ingo Kleppe · Jena, DE
• Ralf Netz · Jena, DE
• Thomas Kalkbrenner · Jena, DE
• Ralf Wolleschensky · Jena, DE
• Yauheni Novikau · Jena, DE

Key dates

• Filing date: Sep 18, 2014
• Grant date: Jan 9, 2018
• Expiry date: Sep 18, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B27/1013
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A microscope and method for high resolution scanning microscopy of a sample, having: an illumination device for the purpose of illuminating the sample, an imaging device for the purpose of scanning at least one point or linear spot across the sample and of imaging the point or linear spot into a diffraction-limited, static single image below a reproduction scale in a detection plane. A detector device for detecting the single image in the detection plane for various scan positions is also provided. An evaluation device for the purpose of evaluating a diffraction structure of the single image for the scan positions is provided. The detector device has a detector array which has pixels and which is larger than the single image. At least one phase mask with a variable lateral profile of the phase influence is included in or near to the objective pupil, or in a plane which is conjugated to the objective pupil, for generating a spatial distribution of the illumination light and/or the detection light perpendicular to the optical axis, and/or in the direction of the optical axis.