Contact array optimization for ESD devices

US9865584B1 · kind B1 · utility

Assignee

• TEXAS INSTRUMENTS INCORPORATED · US

Inventors

• He Lin · Frisco, US
• Kun-Ming Chen · Taoyuan, TW
• Chao-Wei Wu · Changhua City, TW
• Dening Wang · McKinney, US
• Lily Springer · Dallas, US
• Andy Strachan · Santa Clara, US
• Gang Xue · Beijing, CN

Key dates

• Filing date: Nov 4, 2016
• Grant date: Jan 9, 2018
• Expiry date: Nov 4, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D89/611

Abstract

A contact array optimization scheme for ESD devices. In one embodiment, contact apertures patterned through a pre-metal dielectric layer over active areas may be selectively modified in size, shape, placement and the like, to increase ESD protection performance, e.g., such as maximizing the transient current density, etc., in a standard ESD rating test.