Patent · US Active

Mirror array

US9874819B2 · kind B2 · utility

0Cited by

1References

23Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Stig Bieling · Aalen, DE
Markus Hauf · Ulm, DE
Lars Wischmeier · Aalen, DE
Fabian Haacker · Aalen, DE
Martin Endres · Oberkochen, DE
Johannes Eisenmenger · Ulm, DE

Key dates

Filing date	Aug 2, 2016
Grant date	Jan 23, 2018
Priority date	—
Expiry date	Aug 2, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70291
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A mirror array includes a multiplicity of displaceable individual mirrors which are subdivided into at least two groups. The individual mirrors of the first group are displaceable in a very precise manner, and the individual mirrors of the second group are displaceable in a very quick manner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.