Substrate support with multiple heating zones
US9888528B2 · kind B2 · utility
4Cited by
2References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2015 |
| Grant date | Feb 6, 2018 |
| Priority date | — |
| Expiry date | Oct 9, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/037
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Embodiments of substrate supports are provided herein. In some embodiments, a substrate support may include a body having a support surface; and a first heater disposed within the body and having a first heating coil and multiple heating zones, wherein a pitch of windings of the first heating coil vary among each of the multiple heating zones to define a predetermined heating ratio between the multiple heating zones.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.