Patent · US Active

Special construct for continuous non-uniform active region FinFET standard cells

US9893063B2 · kind B2 · utility

5Cited by
2References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 31, 2017
Grant dateFeb 13, 2018
Priority date
Expiry dateJan 31, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Methods for abutting two cells with different sized diffusion regions and the resulting devices are provided. Embodiments include abutting a first cell having first drain and source diffusion regions and a second cell having second drain and source diffusion regions, larger than the first diffusion regions, by: forming a dummy gate at a boundary between the two cells; forming a continuous drain diffusion region having an upper portion crossing the dummy gate and encompassing the entire first drain diffusion region and part of the second drain diffusion region and having a lower portion beginning over the dummy gate and encompassing a remainder of the second drain diffusion region; forming a continuous source diffusion region that is the mirror image of the continuous drain diffusion region; and forming a poly-cut mask over the dummy gate between, but separated from, the continuous drain and source diffusion regions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.