Plasma reactor with non-power-absorbing dielectric gas shower plate assembly
US9905400B2 · kind B2 · utility
8Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2014 |
| Grant date | Feb 27, 2018 |
| Priority date | — |
| Expiry date | Jul 17, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32238
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A gas distribution plate for a plasma reactor has a dielectric front plate and a dielectric back plate bonded together, with gas injection orifices extending through the front plate and gas supply channels in the surface of front plate facing the back plate. The back plate is joined to a heat reflective plate, or the back plate itself is formed of a heat reflective material, such as Beryllium Oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.