Substrate transfer mechanisms
US9905454B2 · kind B2 · utility
2Cited by
11References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2015 |
| Grant date | Feb 27, 2018 |
| Priority date | — |
| Expiry date | Dec 10, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68764
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In one embodiment, a substrate support assembly includes a susceptor for supporting a substrate, and a supporting transfer mechanism coupled to the susceptor, the supporting transfer mechanism having a surface for supporting a peripheral edge of the substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.