Patent · US Active

Insulated gate bipolar transistor with improved on/off resistance

US9905686B2 · kind B2 · utility

0Cited by
10References
1Claims
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Assignee

Inventors

Key dates

Filing dateMar 21, 2016
Grant dateFeb 27, 2018
Priority date
Expiry dateMar 21, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/8325

Abstract

In a plane view of the front surface of the semiconductor substrate, the source region and the first contact region are arranged adjacent to each other in a direction along the gate trench in an area being in contact with a side surface of the gate trench, and the second contact region is arranged adjacent to the source region and the first contact region in an area apart from the gate trench. The impurity concentration of the first contact region is lower than the impurity concentration of the second contact region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.