Patent · US Active

Force measurement with real-time baseline determination

US9910064B2 · kind B2 · utility

1Cited by
1References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 21, 2017
Grant dateMar 6, 2018
Priority date
Expiry dateFeb 21, 2037

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q30/06
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An atomic force microscope (AFM) and corresponding method to provide low force (sub-20 pN) AFM control and mechanical property measurement is provided. The preferred embodiments employ real-time false deflection correction/discrimination by adaptively modifying the drive ramp to accommodate to deflection artifacts.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.