System and method for modulation mapping
US9915700B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 15, 2016 |
| Grant date | Mar 13, 2018 |
| Priority date | — |
| Expiry date | Feb 9, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Probing an integrated circuit (IC), by: electrically applying stimulation signal to said IC; scanning a selected area of said IC with a monochromatic beam; collecting beam reflection from the selected area of said IC, wherein the beam reflection correspond to modulation of the monochromatic beam by active devices of said IC; converting said beam reflection to an electrical probing signal; selecting a frequency or a band of frequencies of said probing signal; utilizing the probing signal to generate a spatial modulation map for various locations over the selected area of said IC; and displaying the spatial map on a monitor, wherein grey scale values correspond to modulation signal values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.