Electrostatic heating substrate holder which is polarised at high voltage
US9922856B2 · kind B2 · utility
0Cited by
3References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 4, 2015 |
| Grant date | Mar 20, 2018 |
| Priority date | — |
| Expiry date | Feb 4, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6831
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a support comprising: The support is remarkable in that the substrate carrier (20) incorporates a heating resistance (26).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.