Cleaning of chamber components with solid carbon dioxide particles
US9925639B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2014 |
| Grant date | Mar 27, 2018 |
| Priority date | — |
| Expiry date | Oct 9, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24C3/32
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Disclosed herein are systems and methods for cleaning a ceramic article using a stream of solid carbon dioxide (CO2) particles. A method includes flowing liquid CO2 into a spray nozzle, and directing a first stream of solid CO2 particles from the spray nozzle toward a ceramic article for a first time duration to clean the ceramic article. The liquid CO2 is converted into the first stream of solid CO2 particles upon exiting the spray nozzle. The first stream of solid CO2 particles causes a layer of solid CO2 to be formed on the ceramic article. After the layer of solid CO2 has sublimated, a second stream of solid CO2 particles is directed from the spray nozzle toward the ceramic article for at least one of the first time duration or a second time duration to further clean the ceramic article.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.