Mobile connectivity and control of semiconductor manufacturing equipment
US9927798B2 · kind B2 · utility
3Cited by
67References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2015 |
| Grant date | Mar 27, 2018 |
| Priority date | — |
| Expiry date | Aug 7, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Integration of semiconductor tool maintenance operations on mobile devices to allow technicians to more accurately perform semiconductor tool maintenance and to allow more accurate analysis of data to improve maintenance procedures to be more repeatable, consistent, and efficient. Remote control of maintenance operations for the semiconductor tool via a portable electronic device decreases the time required to service semiconductor tools and thus increase throughput.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.