High aspect ratio x-ray targets and uses of same
US9934930B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2015 |
| Grant date | Apr 3, 2018 |
| Priority date | — |
| Expiry date | May 30, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2235/086
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An x-ray target, a method of using the x-ray target, and a computer program product with instructions for carrying out a method of using the x-ray target. The x-ray target includes a substrate made from a soft x-ray producing material and a high aspect ratio structure made from a hard x-ray producing material. The hard x-ray producing material is embedded in the substrate, formed on the substrate, cantilevered out from the edge of the substrate, or any combination thereof. The high aspect ratio structure comprises a plurality of high aspect ratio structures arranged in one or more grids or arrays, and the high aspect ratio structures in one of the one or more grids or arrays are arranged to form a Hadamard matrix structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.