Extractor electrode for electron source
US9934933B1 · kind B1 · utility
1Cited by
5References
20Claims
0Family size
Assignee
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Key dates
| Filing date | May 12, 2017 |
| Grant date | Apr 3, 2018 |
| Priority date | — |
| Expiry date | May 12, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/14
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Extractors and extractor systems minimize the generation of secondary electrons which interact with and degrade the primary electron beam. This can improve the performance of an electron beam system, such as a scanning electron microscope. The extractor may include a frustoconical aperture that widens as distance from the source of the electron beam increases. The entrance into the frustoconical aperture also can include a curved edge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.