Patent · US Active

System and method for a comb-drive MEMS device

US9938133B2 · kind B2 · utility

8Cited by

5References

29Claims

0Family size

Assignee

Infineon Technologies Dresden GmbH & Co. KG · DE

Inventors

Thoralf Kautzsch · Dresden, DE
Mohsin Nawaz · Itasca, US
Alfons Dehe · Reutlingen, DE
Heiko Froehlich · Radebeul, DE
Alessia Scire · Dresden, DE
Steffen Bieselt · Wehlen, DE

Key dates

Filing date	Apr 13, 2016
Grant date	Apr 10, 2018
Priority date	—
Expiry date	Apr 13, 2036

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/013
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

According to an embodiment, a method of forming a MEMS transducer includes forming a transducer frame in a layer of monocrystalline silicon, where forming the transducer frame includes forming a support portion adjacent a cavity and forming a first set of comb-fingers extending from the support portion. The method of forming a MEMS transducer further includes forming a spring support from an anchor to the support portion and forming a second set of comb-fingers in the layer of monocrystalline silicon. The second set of comb-fingers is interdigitated with the first set of comb-fingers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.