Optical assembly

US9939730B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Walter Pauls · Wertingen, DE
• Hendrik Wagner · Bielefeld, DE
• Florian Ahles · Aalen, DE
• Christian Wald · Munich, DE
• Steffen Fritzsche · Tholey, DE
• Norbert Wabra · Werneck, DE
• Boris Bittner · Roth, DE
• Sonja Schneider · Lehrberg, DE
• Ricarda Schoemer · Zusmarshausen, DE

Key dates

• Filing date: Dec 8, 2015
• Grant date: Apr 10, 2018
• Expiry date: Feb 13, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/7085
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical assembly, in particular for a lithography system for imaging lithographic micro- or nanostructures, includes at least two optical elements arranged successively in a beam path of the optical assembly, an acquisition device designed to acquire radiation signals from marking elements on or at the at least two optical elements, and a control device coupled to the acquisition device and which is designed to determine the plurality of properties of the optically active surface of the at least two optical elements as a function of the information contained in the radiation signals originating from the marking elements. The disclosure also relates to a method for operating the optical assembly.