Method for preparing cross-sections by ion beam milling
US9947507B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 9, 2015 |
| Grant date | Apr 17, 2018 |
| Priority date | — |
| Expiry date | Nov 22, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosure provides a method for preparing a cross-section of a sample by milling with a focused ion beam. The cross-section is to be prepared at a pre-defined position. The method includes excavating a trench by milling in a first milling direction. The first milling direction leads away from the position of the cross-section to be prepared. The method also includes excavating the cross-section by enlarging the trench by milling in the reversed milling direction. The second milling direction leads towards the position of the cross-section to be prepared, whereupon the milling is completed at the position where the cross-section is to be cut. The desired largest milling depth is achieved at the completion of this milling step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.