Patent · US Active

Range-based real-time scanning electron microscope non-visual binner

US9947596B2 · kind B2 · utility

0Cited by

4References

16Claims

0Family size

Assignee

KLA-TENCOR CORPORATION · US

Inventors

Hemanta Kumar Roy · Khanna, IN
Arpit Jain · Kota, IN
Arpit Yati · Lucknow, IN
Olivier Moreau · Sunnyvale, US
Arun Lobo · Mangalore, IN

Key dates

Filing date	Aug 3, 2016
Grant date	Apr 17, 2018
Priority date	—
Expiry date	Aug 3, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/20
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A technique to identify non-visual defects, such as SEM non-visual defects (SNVs), includes generating an image of a layer of a wafer, evaluating at least one attribute of the image using a classifier, and identifying the non-visual defects on the layer of the wafer. A controller can be configured to identify the non-visual defects using the classifier. This controller can communicate with a defect review tool, such as a scanning electron microscope (SEM).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.