Inventor · Lucknow, IN

Arpit Yati

11Patents
1h-index
18Co-inventors
43Inventor score

Filing activity: Jun 16, 2016 → Dec 29, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9940704B2 Pre-layer defect site review using design Physics 2 Active
US10204416B2 Automatic deskew using design files or inspection images Electricity 1 Active
US11035666B2 Inspection-guided critical site selection for critical dimension measurement Electricity 0 Active
US10692690B2 Care areas for improved electron beam defect detection Electricity 0 Active
US9947596B2 Range-based real-time scanning electron microscope non-visual binner Electricity 0 Active
US11880193B2 System and method for rendering SEM images and predicting defect imaging conditions of substrates using 3D design Emerging Cross-Sectional Technologies 0 Active
US10970834B2 Defect discovery using electron beam inspection and deep learning with real-time intelligence to reduce nuisance Electricity 0 Active
US11967058B2 Semiconductor overlay measurements using machine learning Physics 0 Active
US10957608B2 Guided scanning electron microscopy metrology based on wafer topography Electricity 0 Active
US11094053B2 Deep learning based adaptive regions of interest for critical dimension measurements of semiconductor substrates Physics 0 Active
US11275361B2 Systems and methods for predicting defects and critical dimension using deep learning in the semiconductor manufacturing process Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.