Arpit Yati
11Patents
1h-index
18Co-inventors
43Inventor score
Filing activity: Jun 16, 2016 → Dec 29, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9940704B2 | Pre-layer defect site review using design | Physics | 2 | Active |
| US10204416B2 | Automatic deskew using design files or inspection images | Electricity | 1 | Active |
| US11035666B2 | Inspection-guided critical site selection for critical dimension measurement | Electricity | 0 | Active |
| US10692690B2 | Care areas for improved electron beam defect detection | Electricity | 0 | Active |
| US9947596B2 | Range-based real-time scanning electron microscope non-visual binner | Electricity | 0 | Active |
| US11880193B2 | System and method for rendering SEM images and predicting defect imaging conditions of substrates using 3D design | Emerging Cross-Sectional Technologies | 0 | Active |
| US10970834B2 | Defect discovery using electron beam inspection and deep learning with real-time intelligence to reduce nuisance | Electricity | 0 | Active |
| US11967058B2 | Semiconductor overlay measurements using machine learning | Physics | 0 | Active |
| US10957608B2 | Guided scanning electron microscopy metrology based on wafer topography | Electricity | 0 | Active |
| US11094053B2 | Deep learning based adaptive regions of interest for critical dimension measurements of semiconductor substrates | Physics | 0 | Active |
| US11275361B2 | Systems and methods for predicting defects and critical dimension using deep learning in the semiconductor manufacturing process | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.